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Image Search Results
Journal: Sensors (Basel, Switzerland)
Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System
doi: 10.3390/s19102409
Figure Lengend Snippet: Four-grating interferometer system of the wafer stage and the concept of the encoder with Littrow diffraction for demonstrating the modeling method. Four two-dimensional gratings and the projection lens are installed in a metrology frame, and four 2-DOF encoders are mounted on the corners of the wafer stage. RP, Refraction Prism; QWP, Quarter Wave Plate; PBS, Polarizing Beam Splitter; BS, Beam Splitter; MB, Measuring Beams; RB, Reference Beams; IS, Interference Signals.
Article Snippet: To fully verify the performance of the proposed modeling and calculation method, the simulation model of the nonideally manufactured and assembled grating
Techniques:
Journal: Sensors (Basel, Switzerland)
Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System
doi: 10.3390/s19102409
Figure Lengend Snippet: Definition of coordinate systems. The CS O g i X g i Y g i Z g i fixed to the CS O l X l Y l Z l represents the grating of the grating interferometer #i, and the CS O E i X E i Y E i Z E i fixed to the CS O s X s Y s Z s represents encoder #i. The Euler angles (z-y-x extrinsic) between the CS O g i X g i Y g i Z g i and the CS O l X l Y l Z l is ( t x i , t y i , t z i ) . The red arrows represent the typical internal and external effective optical path of the encoder. Points A and C represent the refraction points of the measuring beams, and point B represent the diffraction spot.
Article Snippet: To fully verify the performance of the proposed modeling and calculation method, the simulation model of the nonideally manufactured and assembled grating
Techniques:
Journal: Sensors (Basel, Switzerland)
Article Title: Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System
doi: 10.3390/s19102409
Figure Lengend Snippet: ( a ) 5-DOF experimental scheme. ( b ) 5-DOF experimental device. HSPMI is the commercial laser interferometer. Red lines indicate commercial laser interferometer system, and dotted lines indicate hybrid interferometer system.
Article Snippet: To fully verify the performance of the proposed modeling and calculation method, the simulation model of the nonideally manufactured and assembled grating
Techniques: